| Flow range (intermediate ranges available) | 최소 0.014...0.7 mln/min
max. 0,18…9 mln/min
(based on N2) |
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| 정확도 (선형도) (실제 검교정 기반) | ±0,8% Rd plus ±0,2% FS for F-110C-005;
±2% FS for F-110C-002 |
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| Repeatability | < 0,2 % RD |
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| Turndown ratio | up to 1:187,5 (1:50 in analog mode) |
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| Multi fluid capability | storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs |
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| Response time (sensor) | FS < 3 mln/min: 2 sec;
FS > 3 mln/min: 1…2 sec |
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| Operating temperature | -10… +70 °C |
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| Temperature sensitivity | zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
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| Pressure sensitivity | < 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
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| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
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| Attitude sensitivity | max. error at 90° off horizontal 0,2% at 1 bar, typical N2 |
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| Warm-up time | 30 min. for optimum accuracy
2 min. for accuracy ± 2% FS |
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